Theguided-moderesonancesenorplaysanimportantroleasamajordissipationlayerinanopt-icalwaveguide.Inthisstudy,wereportthefabricationandcharacterizationofinneropticalwave-guidelayersbasedonfused-silicaandPMMAplatesbyafemtosecondfiberlasermachiningsystem.Thewavelengthandrepetitionrateofthefemtosecondfiberlaserare532nmand1MHz,respec-tively.Weinvestigatedtwomainfabricationparametersforformingtheinnerwaveguide,laserpowerandscanningspeed.Resultsshowthatthemodifiedwidthofinnerwaveguidedecreaseswithincreasingscanningspeed.Byanalyzingthenetfluenceofthelaserpulsesinfabricatingthewave-guide,theenergyrangeforsuccessfullyformedwaveguideinthefusedsilicaandPMMAplatesarefoundwithin0.973-1.216-KJ/cm2and0.363-0.635KJ/cm2,respectively |